6-2-(49)
Normal Serial Interface
Section 6-2
Scroll (Measurement Data)
Scroll (Measurement Data)
The following settings data is for defect (circle) and defect (arc) measurement.
Settings
data
67
Defect color
0: White
1: Black
2: White and black
68
Element size (4 to 80)
69
Comparing pitch (1 to 6)
70
Defect circle radius (20 to 242)
71
Defect circle width (3 to 39)
The following settings data is for defect (arc) measurement.
72
Start angle (arc) (-180.000 to 180.000)
73
End angle (arc) (-180.000 to 180.000)
The following settings data is for circular angle measurement.
Settings
data
74
Mode
0: Black 1: White 2: Black defect 3: White defect
4: Edge
75
Circle 0 radius (circumference) (20 to 242)
76
Circle 1 radius (circumference) (20 to 242)
77
Skipping angle (0.4 to 2.0)
78
Comparing pitch (1 to 9)
79
Necessary number of elements (1 to 99)
80
Edge pitch (1 to 9)
81
Number of circles (1 or 2)
Data
Measure-
ment
data
0
Judgement result
-2: Not measured.
-1: NG
0: OK
1
Scroll X
2
Scroll Y
3
Scroll
q
4
Measurement X
5
Measurement Y
6
Measurement angle
7
Reference X
8
Reference Y
9
Reference angle
Data
Details
Settings
data
32
Scroll X
Judgement upper limit (
-
1,024 to 1,024)
33
Judgement lower limit (
-
1,024 to 1,024)
34
Scroll Y
Judgement upper limit (
-
1,024 to 1,024)
35
Judgement lower limit (
-
1,024 to 1,024)
36
Scroll
q
Judgement upper limit (
-
180.00 to 180.00)
37
Judgement lower limit (
-
180.00 to 180.00)
Data
Details
