2-14-(12)
Density Defects
Section 2-14
1.
Select Detailed conditions.
The Detailed Conditions Settings Screen will be displayed.
2.
Set the element size and comparing pitch.
3.
Select End.
The settings will be registered and the screen in (1.) will return.
CHECK
Method for Judging Defects
When a measurement region is drawn, rectangular areas called elements
are created automatically. The average densities in these elements are
calculated and compared to the average densities of surrounding elements
as the elements are moved across the measurement region. The differenc-
es in the average densities of the elements are called the defect values.
The defect values for all elements are calculated, and if the largest defect
value is equal to or greater than the judgement condition, a defect will be
detected for the measurement region.
Example: Defect (Line)
HELP
Element Size
Determine the element size according to the size of the defect to be detect-
ed. Detection will be more sensitive (and the processing time longer) if the
Region0(Defect(Line))
Measurement conditions
Inspected region
Reference registration
Judgement conditions
Detailed conditions
Clear
Detailed conditions
End
Element size
Comparing pitch
: [10]
: [ 1 ]
Element
Measurement region
Comparing pitch (1 to 6)
Default setting is 1.
Com-
pared
Element size (4 to 80)
Default setting is 10.
The largest difference is taken as
the defect value for the element.
Com-
pared
