2-29-(14)
Calculation
Section 2-29
Circle Position Compensation
@
: Region number (0 to 4)
▲
: Region number (00 to 04)
Scroll
Measurement item
Details
Judgement JG
For unit
Judgement result
Scroll X DX
Compensation in X direction for measure-
ment result
Scroll Y DY
Compensation in Y direction for measure-
ment result
Scroll
q
DT
Compensation angle for measurement result
Measurement X X
X coordinate for measurement result
Measurement Y Y
Y coordinate for measurement result
Measurement angle TH
Angle for measurement result
Judgement
@
R
▲
JG
For region
@
Judgement
result
Correlation
@
R
▲
CR
Model correlation value
Search position
@
R
▲
X
X coordinate for position where model found
Search position
@
R
▲
Y
Y coordinate for position where model found
Measurement item
Details
Judgement JG
Judgement result
Scroll X DX
Compensation in X direction for measurement result
Scroll Y DY
Compensation in Y direction for measurement result
Scroll
q
DT
Compensation angle for measurement result
Measurement X X
X coordinate for measurement result
Measurement Y Y
Y coordinate for measurement result
Measurement angle TH
Angle for measurement result
Reference X SX
X coordinate of reference position
Reference Y SY
Y coordinate of reference position
Reference angle ST
Angle of reference position