6-2-(68)
Normal Serial Interface
Section 6-2
Edge Position (Measurement Data)
Data
Details
Measure-
ment
data
0
Judgement result
-2: Not measured.
-1: NG
0: OK
1
Region 0
Judgement result
2
Edge position X
3
Edge position Y
4
Reference position X
5
Reference position Y
6
Region 1
Judgement result
to
... (Same as for region 0)
36
Region 7
Judgement result
37
Edge position X
38
Edge position Y
39
Reference position X
40
Reference position Y