6-2-(74)
Normal Serial Interface
Section 6-2
Pattern Inspection (Measurement Data)
Data
Details
Measure-
ment
data
0
Judgement result
-2: Not measured.
-1: NG
0: OK
1
Region 0
Judgement result
2
Correlation
3
Position X
4
Position Y
5
Reference position X
6
Reference position Y
7
Region 1
Judgement result
to
... (Same as for region 0)
379
Region 63
Judgement result
380
Correlation
381
Position X
382
Position Y
383
Reference position X
384
Reference position Y