2-20-(15)
Pattern
Section 2-20
2-20-5
Measurement Screens
Detailed measurement values can be displayed on the screen in Monitor and
Run modes. These values are useful when adjusting measurement conditions.
This section describes what kind of information can be displayed for pattern
inspections.
SeeAlso
Refer to
6(&7,210RQLWRU0RGHDQG5XQ0RGH
for details on Monitor and
Run modes.
CHECK
Press the SHIFT+ESC Keys on the Run Screen to access the following screen
and change Display results to Details.
Use the Up or Down Key to change to the unit for which pattern inspection is
set and the following detailed screens will be displayed.
Use the SHIFT+Right or Left Keys to switch in order between the two
screens.
Measurement Region and Position Display
End
Image status
Freeze(Before scroll)
Display image
Image size
Display results
0.Scn 0
RUN
:
:Image0
: All
:
Details
NG
67ms
1.Pattern
Judge :
NG
+
++
0
0.Scn 0
RUN
NG
45ms
The judgement result for this unit.
Inspection region displayed in OK color for OK
result and displayed in NG color for NG result.
(Figures drawn in OR mode are displayed in solid
lines and figures drawn in NOT mode are displayed
in dotted lines.)
Search coordinates
Position at or above candidate level. Displayed
only when search verification set to ON.
Region number