6-2-(41)
Normal Serial Interface
Section 6-2
Edge Position Displacement (Measurement Data)
5
Displacement compen-
sation region 1
None
None
6
Displacement compen-
sation region 1
Displacement compen-
sation region 0
None
7
Displacement compen-
sation region 1
Displacement compen-
sation region 1
None
8
None
Displacement compen-
sation region 1
None
9
Midpoint
None
None
10
None
Midpoint
None
11
Midpoint
Midpoint
None
12
Displacement compen-
sation region 0
Midpoint
None
13
Midpoint
Displacement compen-
sation region 0
None
14
Displacement compen-
sation region 1
Midpoint
None
15
Midpoint
Displacement compen-
sation region 1
None
16
Displacement compen-
sation region 0
Displacement compen-
sation region 0
Displacement compen-
sation region 0
17
Displacement compen-
sation region 1
Displacement compen-
sation region 1
Displacement compen-
sation region 1
18
Midpoint
Midpoint
Relative angle
No.
Displacement X
Displacement Y
Displacement
q
Data
Details
Measure-
ment
data
0
Judgement result
-2: Not measured.
-1: NG
0: OK
1
Scroll X
2
Scroll Y
3
Scroll
q
4
Measurement X
5
Measurement Y
6
Measurement angle
7
Region 0
Judgement result
8
Edge position X
9
Edge position Y
10
Reference position X
11
Reference position Y
12
Region 1
Judgement result
13
Edge position X
14
Edge position Y
15
Reference position X
16
Reference position Y