2-29-(13)
Calculation
Section 2-29
Edge Position Compensation
@
: Region number (0 or 1)
▲
: Region number (00 or 01)
Model Position Compensation
@
: Region number (0 or 1)
▲
: Region number (00 or 01)
Measurement item
Details
Judgement JG
For unit
Judgement result
Scroll X DX
Compensation in X direction for mea-
surement result
Scroll Y DY
Compensation in Y direction for mea-
surement result
Scroll
q
DT
Compensation angle for measurement
result
Measurement X X
X coordinate for measurement result
Measurement Y Y
Y coordinate for measurement result
Measurement angle TH
Angle for measurement result
Judgement
@
R
▲
JG
For region
@
Judgement
result
Edge position
@
R
▲
X
X coordinate for measured edge position
Edge position
@
R
▲
Y
Y coordinate for measured edge position
Reference position
@
R
▲
SX
X coordinate for reference position
Reference position
@
R
▲
SY
Y coordinate for reference position
Measurement item
Details
Judgement JG
For unit
Judgement result
Scroll X DX
Compensation in X direction for mea-
surement result
Scroll Y DY
Compensation in Y direction for mea-
surement result
Scroll
q
DT
Compensation angle for measurement
result
Measurement X X
X coordinate for measurement result
Measurement Y Y
Y coordinate for measurement result
Measurement angle TH
Angle for measurement result
Judgement
@
R
▲
JG
For region
@
Judgement
result
Correlation
@
R
▲
CR
Model correlation value
Search position
@
R
▲
X
X coordinate for position where model
found
Search position
@
R
▲
Y
Y coordinate for position where model
found
Measurement angle
@
R
▲
TH
Angle of found model