2-20-(2)
Pattern
Section 2-20
Operational Flow
CHECK
Pattern inspection uses the image stored at Image 0 as the measurement
image; there is no menu for selecting the measurement image.
1
2
3
3
4
1
2
4
5
Change
measure-
ment condi-
tions.
Set mea-
surement
region.
Change
detailed
conditions.
Set
coordinate
mode.
page 2-20-(4)
(As required) page 2-20-(3)
(As required) page 2-20-(12)
page 2-20-(14)
(As required)
Register
model.
Change
search
coordinates.
Set search
region.
Set
judgement
conditions.
Reference
the model.
page 2-20-(10)
Clear set
region.
page 2-20-(11)
Measure-
ment
screens
page 2-20-(15)