2-14-(26)
Density Defects
Section 2-14
The Judgement Conditions Settings Screen will be displayed.
2.
Change the settings.
3.
Select End.
The settings will be registered and the screen in (1.) will return.
STEP 5: Changing Detection Conditions
To shorten measurement processing time, change the conditions for detecting
defects. The greater the element size and comparing pitch, the shorter the
processing time. However, the accuracy of the measurement will decrease.
Once the element size or comparing pitch setting has been changed, perform
measurements to check that they can be performed correctly.
SeeAlso
Refer to Element Size and Comparing Pitch on page 2-14-(12).
1.
Select Detailed conditions.
The Detailed Conditions Settings Screen will be displayed.
2.
Set the element size and comparing pitch.
3.
Select End.
The settings will be registered and the screen in (1.) will return.
2-14-2-3
Defect (Deviation)
End
128[
30
]
128[ 30 ]
250[255 ]
180[ 0 ]
:
:
:
:
Large defect
Small defect
Density Max.
Density Min.
Region0(Defect(var.box))
Measurement conditions
Left edge
Upper edge
Right edge
Lower edge
Reference registration
Judgement conditions
Detailed conditions
Clear
Detailed conditions
End
Element size
Comparing pitch
: [10]
: [ 1 ]
2
3
1
Draw mea-
surement
region.
Re-register
reference
values.
Set
judgement
conditions.
(As required)
