2-29-(16)
Calculation
Section 2-29
Density Defect Inspection
@
: Region number (0 to 7)
▲
: Region number (00 to 07)
Measurement item
Details
Judgement JG
Unit judgement result
Judgement
@
R
▲
JG
For region
@
Judgement
result
Measurement region
@
R
▲
X1
Upper left X coordinate of
measurement region
Measurement region
@
R
▲
Y1
Upper left Y coordinate of
measurement region
Measurement region
@
R
▲
X2
Bottom right X coordinate of
measurement region
Measurement region
@
R
▲
Y2
Bottom right Y coordinate of
measurement region
Large defect
@
R
▲
BD
Degree of large defect for
measurement result
Small defect
@
R
▲
LD
Degree of small defect for
measurement result
Maximum density
@
R
▲
GA
Maximum density in the mea-
surement region
Minimum density
@
R
▲
GI
Minimum density in the mea-
surement region
Deviation
@
R
▲
DV
Density deviation for mea-
surement result
Large defect position
@
R
▲
BX
X coordinate of largest defect
measured
Large defect position
@
R
▲
BY
Y coordinate of largest defect
measured
Small defect position
@
R
▲
LX
X coordinate of smallest
defect measured
Small defect position
@
R
▲
LY
Y coordinate of smallest
defect measured
Deviation position
@
R
▲
VX
X coordinate of measured
deviation defect position
Deviation position
@
RY
▲
VY
Y coordinate of measured
deviation defect position
Reference position large
@
R
▲
SBX
X coordinate of position of
large defect when region
drawn
Reference position large
@
R
▲
SBY
Y coordinate of position of
large defect when region
drawn
Reference position small
@
R
▲
SLX
X coordinate of position of
small defect when region
drawn
Reference position small
@
R
▲
SLY
Y coordinate of position of
small defect when region
drawn
Reference position deviation
@
R
▲
SVX
X coordinate of deviation
defect position when region
drawn
Reference position deviation
@
R
▲
SVX
Y coordinate of deviation
defect position when region
drawn