6-2-(44)
Normal Serial Interface
Section 6-2
Model Position Compensation (Measurement Data)
Data
Details
Measure-
ment
data
0
Judgement result
-2: Not measured.
-1: NG
0: OK
1
Scroll X
2
Scroll Y
3
Scroll
q
4
Measurement X
5
Measurement Y
6
Measurement angle
7
Region 0
Judgement result
8
Correlation
9
Position X
10
Position Y
11
Angle
12
Region 1
Judgement result
13
Correlation
14
Position X
15
Position Y
16
Angle