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6-2-(37)
Normal Serial Interface
Section 6-2
EC Position Compensation (Measurement Data)
Data
Details
Measure-
ment
data
0
Judgement result
-2: Not measured.
-1: NG
0: OK
1
Scroll X
2
Scroll Y
3
Scroll
q
4
Measurement X
5
Measurement Y
6
Measurement angle
7
Region 0
Judgement result
8
Measurement position X
9
Measurement position Y
10
Measurement angle
11
Reference position X
12
Reference position Y
13
Reference angle
14
Radius
15
Circular value
16
Line length 1
17
Line length 2
18
Upper left apex X
19
Upper left apex Y
20
Lower left apex X
21
Lower left apex Y
22
Upper right apex X
23
Upper right apex Y
24
Lower right apex X
25
Lower right apex Y
26
Region 1
Judgement result
27
Measurement position X
to
.... (Same as for region 0)
43
Lower right apex X
44
Lower right apex Y