2-15-(5)
EC Defect
Section 2-15
2-15-2
Extracting Edges
EC defect inspection is performed for images for which the edges have been
extracted.
Adjust the upper and lower levels for edge extracting if there is low contrast
between the measurement object and the background and to remove noise.
Upper and Lower Limits
Set the level to which the background will be cut from the edge-extracted
image. The levels can be set between 10 and 255 (default 100:255).
Areas with a density above the lower limit will become the edge of the mea-
surement object. Refer to the following examples and adjust the upper and
lower limits.
Example: Cannot Find Edges Due to Low Contrast
Example: To Remove Noise
Example: Other Edges Clearly Extracted But Cannot Find Desired Mark
Edge with Stability
Mask Size
The mask size function is used when searching for edges to judge edges
using peripheral information. Select how much peripheral pixel information to
use. The selections are 5
5 (default) or 3
3.
Edge-extracted image
Reduce lower limit.
Cannot find edges
Edge-extracted image
Increase lower limit.
Edge-extracted image
Reduce upper limit.
Low contrast with background
High contrast with background
The edges of low
contrast sections also
clearly extracted.
