17
15.2.6 PS1 to PS4 Circulation Pump (PU702 to PU705) Replacement ........................... 15-11
15.2.7 Processing Solution Tank Exhaust Fan 1 (F704) Replacement............................ 15-13
15.2.8 Processing Solution Tank Exhaust Fan 2 (F705) Replacement............................ 15-13
16. PROCESSING SOLUTION REPLENISHMENT SYSTEM
....................................... 16-1
16.1.1 Replenisher Box Door Open/Close Detecting Interlock Switch (D724)
16.1.3 Replenisher Cartridge Box Upper/Lower Sensor (D722/D723) Replacement ........ 16-4
16.2.2 P1R/P2RA/P2RB Pump (PU721/PU722/PU723) Replacement............................ 16-10
16.2.8 PSR Upper/Lower Level Sensor (FS723/FS727) Replacement............................ 16-16
16.2.9 P1R Upper/P2RA/B Upper/P1R Lower/P2RA/B Lower Level Sensor
(FS720/FS721/FS722/FS724/FS725/FS726) Replacement ............................. 16-17
16.3.2 Rack Auto Washing Valve/P1WR Water Replenishment Valve
16.3.3 P1R/P2RA/P2RB Cartridge Washing/P1R Stirring Valve
................................................................................................................. 17-1