20-13
20.1 I/O Parts Diagrams
20
■
Processing Solution Replenisher
■
Dryer Section
Symbol
Name
Remark
M720
Cartridge opening motor
Pulse Motor
D721
Replenisher cartridge setting sensor
Photo Interrupter
D722
Replenisher cartridge box upper sensor
Photo Interrupter
D723
Replenisher cartridge box lower sensor
Photo Interrupter
D724
Replenisher cartridge door interlock
Micro Switch
FS700
P1 solution level sensor
FS701
P2 solution level sensor
FS702
PS1 solution level sensor
FS703
PS2 solution level sensor
FS704
PS3 solution level sensor
FS705
PS4 solution level sensor
FS706
PS4 solution concentration sensor
FS720
P1R upper level sensor
FS721
P2RA upper level sensor
FS722
P2RB upper level sensor
FS723
PSR upper level sensor
FS724
P1R lower level sensor
FS725
P2RA lower level sensor
FS726
P2RB lower level sensor
FS727
PSR lower level sensor
FS728
Waste solution level sensor
Symbol
Name
Remark
F760
Dryer fan
H760~H767
Dryer heater
M770
Dryer section drive motor
DC Motor
D760A
Dryer heater safety thermostat 1
To monitor any abnormality in
heater temperature
D760B
Dryer heater safety thermostat 2
To monitor any abnormality in
heater temperature
D762A
Dryer section open/close detecting interlock switch
Micro Switch
D762B
Dryer belt unit open/close detecting interlock switch
Micro Switch
TS760
Dryer thermometer
To monitor any abnormality in
heater temperature