Zeiss LSM 710, Operating Manual

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CENTER SCREEN AREA / IMAGE CONTAINERS - … LSM 710 and LSM 780
Carl Zeiss Topography View Systems
216 M60-1-0025
e 02/2010
(1) 2D Amplitude parameters (Profile Roughness):
Mean height z Rc Pc Wc
Dispersion Arithmetic mean deviation Ra Pa Wa
Root mean square deviation Rq Pq Wq
Asymmetry Skewness Rsk Psk Wsk
Sharpness Kurtosis Rku Pku Wku
Highest peak Rp Pp Wp
Lowest valley Rv Pv Wv
Absolute peak to valley Rt Pt Wt
Averaged peak to valley Rz Pz Wz
Extremes
Maximum peak to valley Rmax Pmax Wmax
If chosen filters are FFT High No, M FFT L
(2) Calculation of roughness parameters:
The 2D roughness calculation is based on DIN EN ISO 4287. The following roughness parameters are
calculated (e.g. for a Y-section)
−
Mean height of all profile height values R
c
( )
∑
=
⋅ ⋅ = −
y
N
j
j
y
c
y x z
N
R
1
,
1
N
x
, N
y
... number of pixels in X- or Y-direction
Arithmetic mean deviation of all profile height values
R
a
( )
[ ]
∑
=
− ⋅ ⋅ = −
y
N
j
c j
y
a
R y x z
N
R
1
,
1
−
Quadratic mean deviation of all profile height values R
q
( )
[ ]
∑
=
− ⋅ ⋅ = −
y
N
j
c j
y
q
R y x z
N
R
1
2
,
1
−
Skewness of the distribution of all profile height values R
SK
) , (
1
1
3
3 j
N
j
q y
SK
y x z
R N
R
y
∑
=
⋅ ⋅
⋅
=