LEFT TOOL AREA AND HARDWARE CONTROL TOOLS
LSM 710 and LSM 780
Carl Zeiss
Maintain Tab
Systems
142 M60-1-0025
e
02/2010
5.4.1.1
Pinholes Section Panel
The
Pinholes Section
panel has the following options:
Description
field:
Display of the relevant active channel.
Diameter [µm] slider
Position X Vis [µm] slider
Position Y Vis [µm] slider
Position X InVis
[µm] slider
Position Y InVis
[µm] slider:
Setting of diameter, X-, Y- and Z-position of the pinhole in relation to
the beam path (Z-position can be set only for PH1) using the slider or
arrow buttons
Status display for setting procedure: green for ready and red for busy.
Stored Pos
button:
Pinhole setting is reset to the position last stored.
Adjustment: Adjust
Automatically
button:
Automatic pinhole adjustment (not available in some systems).
Fast Adjust Mode
check box:
If this check box is activated, the pinhole adjustment is only performed
in a limited area. Used for readjustment (not available in some
systems).
No further software function can be activated and executed while automatic pinhole adjustment is
running.
