2-29-(19)
Calculation
Section 2-29
Edge Position
@
: Region number (0 to 7)
▲
: Region number (00 to 07)
Fine Matching
EC Circle Count Inspection
@
: Region number (0 to 63)
▲
: Region number (00 to 63)
Pattern Inspection
@
: Region number (0 to 63)
▲
: Region number (00 to 63)
Measurement item
Details
Judgement JG
Unit judgement result
Judgement
@
R
▲
JG
For region
@
Judgement
result
Edge position
@
R
▲
X
X coordinate of measured edge position
Edge position
@
R
▲
Y
Y coordinate of measured edge position
Reference position
@
R
▲
SX
X coordinate for reference position
Reference position
@
R
▲
SY
Y coordinate for reference position
Measurement item
Details
Judgement JG
Judgement result
Quantity DA
Number of labels for measurement result
Area AR
Area for measurement result
Gravity X
X coordinate of center of gravity for measurement result
Gravity Y
Y coordinate of center of gravity for measurement result
Measurement item
Details
Judgement JG
For unit
Judgement result
Quantity CN
Number of measured circles
Circle center
@
CX
▲
For region
@
X coordinate of center of measured circle
Circle center
@
CY
▲
Y coordinate of center of measured circle
Circle radius
@
CR
▲
Radius of measured circle
Circular value
@
CV
▲
Evaluation value of measured circle
Measurement item
Details
Judgement JG
Judgement result
Judgement
@
R
▲
JG
For region
@
Judgement
result
Correlation
@
R
▲
CR
Correlation with model
Search position
@
R
▲
X
X coordinate of position where model
found
Search position
@
R
▲
Y
Y coordinate of position where model
found
Reference position
@
R
▲
SX
X coordinate of reference position
Reference position
@
R
▲
SY
Y coordinate of reference position
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