2-14-(11)
Density Defects
Section 2-14
STEP 4: Setting Judgement Conditions
Set the conditions for determining defects. Set a value between 0 and 255 as
the OK judgement value for the measurement conditions set in step 1. The
defect value will be higher the clearer the defect. Measure several samples
and set the judgement conditions while referring to the measurement results.
1.
Select Judgement conditions.
The Judgement Conditions Setting Screen will be displayed.
2.
Make the settings.
3.
Select End.
The settings will be registered and the screen in (1.) will return.
STEP 5: Changing Detection Conditions
To shorten measurement processing time, change the conditions for detecting
defects. The greater the element size and comparing pitch, the shorter the
processing time. However, the accuracy of the measurement will decrease.
Once the element size or comparing pitch setting has been changed, perform
measurements to check that they can be performed correctly.
End
:
Judgement conditions
128[
30
]
128[ 30 ]
250[255 ]
180[ 0 ]
:
:
:
:
Large defect
Small defect
Density Max.
Density Min.
Set the upper limit for an OK judgement.
(The lower limit is fixed to 0.)
Example: When judgement value set to 30:
Measurement results in the range 0 to 30
will give an OK judgement.
Measurement result for the displayed image
Use as a reference for setting conditions.
Region0(Defect(Line))
Measurement conditions
Inspected region
Reference registration
Judgement conditions
Detailed conditions
Clear
End
128[
30
]
128[ 30 ]
250[255 ]
180[ 0 ]
:
:
:
:
Large defect
Small defect
Density Max.
Density Min.
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