2-14-(9)
Density Defects
Section 2-14
STEP 3: Re-registering Reference Values
Position detection can also be performed using algorithms for detecting
defects. When a measurement region is drawn, measurement is performed for
the displayed image and the results are registered as the reference values (X
and Y coordinates of the position where both large and small defects were
found). If this function is used, however, the reference value alone can be re-
registered based on the currently displayed image.
CHECK
Reference values for 2 positions can be registered, regardless of the settings
for large and small defect inspections under Measurement conditions.
Example: Inspecting Whether or Not the Measurement Object Is Always
in the Same Position
Display a measurement object in the correct position, detect a mark, and reg-
ister that position as the reference position.
CHECK
The reference value can be changed to enable the following function.
Inspecting Positions from a Specified Point
Once a mark has been detected in the image currently displayed, the refer-
ence position is changed to an suitable point. Position inspection can be per-
formed by calculating the difference between this reference position and the
measurement position.
CHECK
If the measurement region is changed, the reference values return to the
default setting.
Register the detected mark as the reference position.
Reference position (changed to a suitable point)
Measurement position
(mark detected as a defect)
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