Chapter 2 - Dimensions and Mounting
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MNL000295.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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2.2
Mounting Hole Locations
The GASGUARD® Source System Enclosures or Racks are mounted to the facility floor using four
(4) anchors, one in each corner of base.
Highest tension load when resisting tipover is approximately 580 pounds (2580 N) per anchor, as
calculated utilizing seismic accelerations specified by SEMI S2-93A. The facility floor mounting
location should be clean and must be level.
For Enclosure anchoring figures see Section 2.2.1. For rack anchoring figures see section 2.2.2.