Chapter 8 - Operating Procedures
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MNL000302.doc
Revision 2
01/04/2019
SourceSystemTE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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6.
Press
then
to initialize the controller on power up. No alarms should
be present. If alarms are present,
do not continue.
Follow the troubleshooting procedures
found in Chapter 9. If needed, contact you Versum Materials, Inc. factory representative for
assistance.
7.
Check that all automatic valves indicate closed position (default is green).
8.
Check that regulators are closed (knob rotated fully counterclockwise).
9.
Ensure the process pigtail connection cap/plug is installed and tight.
10.
For systems with internal purge, install an inert purge gas cylinder in the cabinet. Refer to
Section 8.3.1.2 Full Purge Gas cylinder Installation. For systems with external purge, verify
that purge gas is available.
11.
Select
and goto Main Menu to enter the password.
12.
Select the Main menu for a side you wish to purge.
13.
On the Main Menu screen, highlight “—START PRE PURGE—“.
14.
Follow the prompts on the screen.
15.
When the controller status box indicates “—PRE PURGE COMPLETE—“, select “—START
CYL CHANGE—“.
16.
Follow the prompts on the screen.
17.
Refer to Section 8.3.2.3 Full Process Gas Cylinder Installation.
18.
When the controller status box indicates “—CYL CHANGE COMPLETE—“ select “—
START
POST PURGE—“.
19.
Follow any prompts that may be on the screen.