Chapter 7 - System Description
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MNL000301.doc
Revision 2
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Post Purge
This option only appears on the Main Menu after a Change Cylinder has been completed.
This option starts the post cylinder change purge sequence.
The post cylinder change purge sequence purges the process panel after a process cylinder change. It
tests for gross leaks at the pigtail cylinder connection.
As with the pre purge, the number of purge cycles is determined by the process gas type. Cycles may
be increased (See TE11 Source System Configuration in Chapter 8 Section 6 of this manual), but not
reduced below the minimum.
Rough Line Evac (Optional)
This option starts the rough line evacuation sequence.
The rough line evacuation sequence purges the process line between the gas cabinet and the tool. It is
used to remove process gas before maintenance on a component, such as a mass flowmeter, located
between the cabinet and the tool. It is also used to remove contaminants after maintenance is complete.
This sequence alone does not remove the
process gas from the process line to an
acceptable threshold limit value (TLV).
It is Versum Materials, Inc.' recommendation
to follow the Rough Line Evac sequence with
an inert flow (flush) from the gas cabinet to
the tool.
This can be established with the use of
Manual Mode operation as described in
Chapter 8 Section 5.
Panel Purge (Optional)
This option starts the panel purge sequence. The panel purge sequence evacuates the entire process
panel, including both the high pressure and low pressure sides, and then purges the low pressure side
of the panel up to V3. It is used to remove process gas before any maintenance is performed on the
panel or if the entire panel is to be removed.