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MNL000239.doc
Revision 3
01/07/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page C
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8
7.9.3
Description of Operation ..................................................... 7‐19
7.9.4
Alarm Conditions and Responses ........................................ 7‐21
7.10
Multiple Process Outlets ..................................................... 7‐21
Chapter 8
Operating Procedures
8.1
Emergency Shutdown Procedures .................................. 8-3
8.2
Operation of the Source System Controller ................... 8-5
8.2.1
Source Mode Menu (Left or Right side) ......................... 8-8
8.3
Process and Purge Cylinder Procedure ........................... 8-9
8.3.1
Inert Purge Gas Cylinder Change Procedure .................. 8-10
8.3.2
Process Gas Cylinder Procedures .................................... 8-14
8.4
New System Startup Procedures ..................................... 8-21
8.5
Manual Mode Operation ................................................. 8-23
8.5.1
How to Operate in Manual Mode .................................... 8-23
8.5.2
How to Open and Close Valves ...................................... 8-25
8.5.3
General Principles of Manual Operation ......................... 8-26
8.6
Source System Configuration ......................................... 8-27
8.6.1
Net Product ...................................................................... 8-29
8.6.2
Alarm Setpoints ............................................................... 8-29
8.6.3
Subcycle Parameters ....................................................... 8-30
8.6.4
Leak Test Parameters ...................................................... 8-30
8.6.5
Digitals Inputs ................................................................. 8-31
8.6.6
Digitals Outputs .............................................................. 8-31
8.6.7
Analog Inputs .................................................................. 8-31
8.6.8
Analog Setput .................................................................. 8-31
8.6.9
Analog Conditions .......................................................... 8-32
8.6.10
Helium Leak Check ......................................................... 8-32
8.6.11
Password List .................................................................. 8-32
8.6.12
System Setup ................................................................... 8-32
8.6.13
Edit Date / Edit Time ...................................................... 8-32
Chapter 9
Troubleshooting
9.1
Troubleshooting the Controller ...................................... 9-3
9.1.1
System Off, No Display on Controller ............................ 9-3
9.1.2
Incorrect Analog Value on Display ................................. 9-4
9.1.3
Digital Input Not Working .............................................. 9-4
9.1.4
Valve Does Not Open ..................................................... 9-5
9.2
No or Low Purge Gas Pressure ....................................... 9-5
9.3
No or Low Purge Gas Flow ............................................ 9-6
9.4
No or Low Process Gas Pressure .................................... 9-6
9.5
No or Low Process Gas Flow .......................................... 9-7
9.6
Typical Alarms ................................................................ 9-7
9.6.1
Excess Flow .................................................................... 9-8
9.6.2
Low Pneumatic Pressure ................................................. 9-8
9.6.3
Low Process Cylinder Pressure or Very Low Process