Chapter 6 - Functional Checklist
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MNL000300.doc
Revision 1
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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6.1 Source System Utility Checklist
1. Cabinet located and mounted to floor (see Chapter 2).
2. Cabinet exhaust duct installed, functioning and monitored for loss of exhaust
(see Chapter 3 Section 7).
3. Sprinkler line installed (if applicable) and pressurized (see Chapter 3 Section 8).
4. Grounding wire installed (cabinet and controller) and checked for less than 1
ohm resistance (see Chapter 4 Section 1).
5. Electrical power (120/240 VAC, 50/60 Hz) connected (see Chapter 4 Section 2).
6. Remote I/O wiring installed and checked (see Chapter 4 Section 4).
7. GASGUARD® Network wiring installed (if applicable) and configured on the
host (see Chapter 4 Sections 5 and 6).
8. Process line installed and helium leak tested (see Chapter 3 Section 2).
9. Vent line installed and helium leak tested (see Chapter 3 Section 3).
10. Venturi line installed, leak tested and 75-95 psig (5.2-6.6 barg) of nitrogen
available (see Chapter 3 Section 4).
11. Purge line installed and helium leak tested (see Chapter 3 Section 5). (If
external purge cylinder utilized.)
12. Pneumatic supply connected to controller and 85-95 psig
max. (5.9-6.6 barg) of nitrogen available (see Chapter 3 Section 6).
13. Source System internal piping helium leak tested (see Chapter 5).
14. Purge cylinder available.
15. Hazardous gas monitor installed and operating.
16. Properly sized RFO installed in process cylinder valve (see Chapter 3 Section 11).