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MNL000239.doc
Revision 3
01/07/2019
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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TABLE OF CONTENTS
Introduction
Section 1
Title ................................................................................ I-1
Chapter 1
Safety Warnings
1.1
Introduction ..................................................................... 1-2
1.1.1
Level or Intensity of Hazard .......................................... 1-2
1.1.2
Hazard Types (Symbols) ................................................. 1-2
1.2
Important Safety Warnings ............................................. 1-5
1.3
Inert Gas Hazards ............................................................ 1-6
1.4
Pressurized Fluids / Gases ............................................... 1-7
1.5
Electrical Hazard ............................................................. 1-7
1.6
Falling Equipment Hazard .............................................. 1-8
1.7
Gas Cylinder Handling Hazard ....................................... 1-8
1.8
Pinch Hazard ................................................................... 1-8
1.9
Personal Protective Equipment ....................................... 1-9
1.10
Hazard Warnings ............................................................. 1-12
1.10.1
Toxic Gas Hazards .......................................................... 1-13
1.10.2
Corrosive Gas Hazards .................................................... 1-14
1.10.3
Flammable and Pyrophoric Gas Hazards ........................ 1-14
1.10.4
Oxygen and Other Oxidizer Hazards .............................. 1-16
1.10.5
Inert Gas Hazards ............................................................ 1-18
1.10.6
Pressurized Gases ............................................................ 1-20
1.10.7
Cylinder Handling Hazards ............................................. 1-20
1.10.8
Electrical Hazards ........................................................... 1-21
1.10.9
Purge Gas Backstream Hazard ........................................ 1-22
1.11
Typical Minimal Lockout or Tagout System Procedures 1-22
1.12
Safety Signs and Labels .................................................. 1-26
1.13
Equipment Safety Features ............................................. 1-35
1.14
Safety Literature for Handling and Use of Gas Cylinders 1-36
1.15
Safety Literature for Handling and Use of Instrument
Nitrogen Supply .............................................................. 1-36
Chapter 2
Dimensions and Mounting
2.1
Outline Dimensions ........................................................ 2-2
2.1.1
Outline Dimension Figures for 2 Cylinder Source Systems 2-3
2.1.2
Outline Dimension Figures for 3 Cylinder Source Systems 2-8
2.1.3
Outline Dimension Figures for 1x1 Cylinder Source
Systems ........................................................................... 2-13
2.1.4
Outline Dimension Figures for 1x2 Cylinder Source
Systems ........................................................................... 2-18
2.2
Mounting Hole Locations ............................................... 2-23
2.2.1
Cabinet Anchoring .......................................................... 2-24
2.2.2
Rack Anchoring .............................................................. 2-29