Chapter 6 - Functional Checklist
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MNL000300.doc
Revision 1
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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6
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Cylinder conn. seating surface condition acceptable
Verify and record cylinder orifice size (see Chapter 3
Section 11 and warnings Chapter 8 Section 3)
VERSUM MATERIALS, INC. TE11 SOURCE SYSTEM FIELD START‐UP CHECKLIST
page 2 of 9
PIPING/MECHANICAL
(cont.)
Check off line item when completed
Sign and date when section completed
Left side or single
Right side
Shelf kit installed and adjusted
Cyl. Chains / Cyl. Straps (circle )
Trickle purge gasket installed
Correct venturi pressure present
Minimum 75 psig (5.2 barg)
Correct pneumatic pressure present
85 psig to 95 psig max. (5.9‐6.6 barg)
Purge cylinder installed
Gas detection system operational
Secondary containment installed
Process Gas cylinder has proper size RFO installed
Pneumatics for cylinder valve operator, Or CGA
Cylinder Indicator installed
Verify and record flow switch rating
See Quality Inspection and Test Sheet
High pressure flow switch rating
Low pressure flow switch rating
SECTION COMPLETED SIGNATURE__________________ DATE ________
Notes: _
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