Chapter 8 - Operating Procedures
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MNL000302.doc
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01/04/2019
SourceSystemTE11
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8.3
Process and Purge Cylinder Procedures
Only operators trained in the following
procedures and the hazardous gas system
are allowed to change cylinders.
High pressure gas cylinders can be
extremely hazardous when not handled
properly. Follow the procedures in this
section to prevent personal injury or death.
The procedures listed in this section are
intended to be used in conjunction with the
purge and cylinder change functions of the
cabinet controller. Do not use these
procedures independently.
All high pressure gas cylinders containing
highly toxic or pyrophoric gases must have
an RFO installed in the cylinder. Do not
operate equipment without a properly sized
RFO in place
Any HPM container > 15psig must have
an RFO installed in the cylinder valve if
there is no Excess Flow Switch installed in
the system. Do not operate equipment
without a properly sized RFO in place
All silane cylinders and silane mix cylinders
containing 2% or more silane must have an
RFO installed in the cylinder valve with a
maximum orifice diameter of 0.010 inch. Do
not operate equipment without a properly
sized RFO in place.