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MNL000302.doc
Revision 2
01/04/2019
SourceSystemTE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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8
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Depending upon the security level you are assigned to, you may only be able to view
certain setpoints that you have permission to change. These values are identified by a
white box around them. Setpoints shown with a Red box are VERSUM MATERIALS,
INC. specific setpoints.
8.6.3 Subcycle Parameters
This option displays the current values for the purge parameters. You may increase these values, but
may not decrease them below their pre-programmed minimum. The purge parameters and their
Versum Materials, Inc. minimum values follow:
High Pressure Cycles = 20
Low Pressure Cycles = 20
Helium Leak Inboard = 1
Helium Leak Outboard = 1
To change a setpoint, first select the analog input, by touching the value you wish to change. A key
pad will appear on the screen allowing you to enter a number. Pressing the enter
key will
change the value.
8.6.4 Leak Test Parameters
This option displays the current values for the leak parameters. You may increase these values, but
may not decrease them below their pre-programmed minimum. The leak parameters and their Versum
Materials, Inc. minimum values follow:
Cylinder Leak Test Min. of Testing = 5 Press. Differ. = 5psi (.344 barg)
Decay Test Min. of Testing = 5
Press. Differ. = -5psi (-.344 barg)
V-3 Leak Test Min. of Testing = 5
Press. Differ.= 5 psi (.344 barg)
HP Leak Test Min. of Testing = 10
Press. Differ. = 5 psi (.344 barg)
To change a setpoint, first select the analog input, by touching the value you wish to change. A key
pad will appear on the screen allowing you to enter a number. Pressing the enter
key will
change the value.
All Decay Test parameters must have a
negative value for the pressure
difference in order to detect a leak and
alarm.