Chapter 7 - System Description
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MNL000301.doc
Revision 2
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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The source mode menu provides access to the controllers' sequences. It is password
‐
protected.
Contact your Versum Materials, Inc. Representative for your system password. Section 8.2
explains how to enter a password. Some options are only available after completing another
sequence. For example, a cylinder change must be preceded by pre purge.
The following options are available from the main menu:
Process Gas Flow
This option starts and stops the process gas flow.
The start sequence tests the process panel for adequate process pressures.
If problems are found, process gas flow is not started and an alarm is displayed. Details of these alarms
are located in Chapter 11 (System Specific Information) of this manual.
If no problems are found, the process gas flow is started. Flow continues until a process stop, or until
an alarm condition causes a shutdown.
Pre Purge
This option starts the pre purge sequence prior to cylinder change.
It tests for a gross leak at the cylinder valve. The primary purpose of this test is to provide operator
safety and protect purity of the system.
The pre purge sequence tests for adequate vacuum, then initiates a series of purges of the process
piping to remove all process gas before changing the process gas cylinder.
The number of purge cycles depends on the type of process gas. Minimum values are built into the
sequence. Cycles may be increased (see TE11 Source System Configuration in Chapter 8 Section 6 of
this manual), but not reduced below the minimum.
Change Cylinder
This option only appears on the Main Menu after a Pre Purge has been completed.
This option is used when changing the process cylinder. It must be preceded by a pre purge sequence.
This sequence tests for high pressure, which is an indication of a process cylinder valve leak, and then
establishes a trickle purge flow through the pigtail for cylinder removal and replacement.
If a safe condition is detected, you are prompted to remove the spent cylinder and replace it.