Chapter 9 - Troubleshooting
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MNL000303.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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9.6.1 Excess Flow
Probable Cause
Corrective Action
High process gas flow due to mechanical
failure or product surge.
Examine process gas system to locate
cause of signal.
9.6.2 Low Pneumatic Pressure
Probable Cause
Corrective Action
Pneumatic supply to the controller is less
than 65 psig (4.5 barg).
Adjust pneumatic pressure to the
controller to 85-95 psig (5.9-6.6 barg).
PT1 (Process Cylinder Transducer) Alarms
The following are possible process cylinder transducer alarms.
9.6.3
Low Process Cylinder Pressure or Very Low Process Cylinder Pressure
Probable Cause
Corrective Action
Process cylinder is below the low and/or
very low setpoint.
OR
Cylinder valve is not open.
Follow the process cylinder change-out
procedure found in Chapter 8 Section 3 of
this manual.
Ensure cylinder valve is open.
9.6.4 Low Vacuum at PT1
Probable Cause
Corrective Action
Vacuum at PT1 < -5 psig (0.67 barg) due
to Vacuum Venturi supply pressure or
flow requirement is insufficient.
OR
PT1 path to vent is isolated either from a
closed manual valve or an air operated
valve in this path not actuating.
Verify Venturi supply is 75-95 psig (5.2-
6.6 barg) and that a flow rate of 50-60
slpm (105-127 cfh) can be achieved.
Visually inspect the panel for a closed
manual valve in the path to vent and
verify 85-95 psig (5.9-6.6 barg) of
pneumatic supply pressure is being
supplied to the controller.