Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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3.2
Process Line Connection
The process line connection can be furnished in one of two configurations: Standard Bulkhead or
Coaxial Bulkhead.
The standard bulkhead permits a single process out line to penetrate the enclosure, while providing an
acceptable seal for enclosure ventilation purposes. Figure 3.1 shows a standard bulkhead.
1/4”or 3/8” TOD Gas Line
Continuous (Passes Through
Bulkhead)
Cabinet Top
Compression Fitting
Grips OD of Tube
Nut
Figure 3.1:
Standard Bulkhead
The coaxial bulkhead permits a single process out line to penetrate the enclosure, while providing an
acceptable seal for enclosure ventilation purposes. In addition, the coaxial bulkhead provides a
termination point for an outer secondary containment tube. The outer secondary containment tube, or
jacket, is connected directly to the coaxial bulkhead. The outer secondary containment continues
through the coaxial bulkhead and terminates as a branch on the coaxial bulkhead inside the enclosure.
This branch on the outer secondary containment may remain open, be dead ended, or be pressurized
with inert gas, depending on the method chosen to monitor the secondary containment tube for leaks.
Two methods of monitoring are typically used: gas detection or pressure decay of the annular space.
An open or vented annular space is monitored at the open end with a toxic gas detection system
(customer supplied), and vented to a scrubbed exhaust system. The pressure decay technique requires
the annular space to be pressurized with inert gas (typically nitrogen) above the process gas delivery
pressure (typically 100 psig/6.9 barg) and monitored for decay with a pressure switch. Pressure decay
indicates either a process gas leak or jacket leak. It is Versum Materials, Inc. recommendation, and
standard practice, to configure this alarm as a source system shutdown.