Chapter 5 - Helium Leak Testing
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MNL000299.doc
Revision 1
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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How to Perform Helium Leak Checking in Manual Mode
Operating in Manual Mode can cause the
following hazards which can result in
PERSONAL INJURY OR DEATH.
Process gas could be forced into the
purge panel and/or purge gas cylinder.
Opening purge panel valves when high
pressure process gas is present.
High pressure process gas could be
unintentionally vented.
Opening vent valves when high
pressure process gas is present.
No process gas cylinders should be connected
at this time. If one is or was connected, do
not continue, as personal injury or death can
result. Contact an Versum Materials, Inc.
representative for system verification.
NOTE: Due to the potential hazards listed above, Manual Mode operation requires a
second or higher level security code.
NOTE: Prior to shipment, the GASGUARD® Source System panel has been certified
to strict cleanliness specifications. Improper operation of the valves in "Manual
Mode" could result in contamination of the gas panel
NOTE: A pneumatic supply connected to the controller with 85-95 psig (5.9-6.6
barg) of nitrogen must be available to actuate the valves.
NOTE: Some shutdown alarms (indicated by the red SHUTDOWN INDICATOR on the top
left of the screen being lit) will not allow you to access and open valves in manual mode,
therefore making a leak test invalid. Manual mode availability is shown in the mode menu.
If a shutdown alarm is present, contact an Versum Materials, Inc. representative for system
verification prior to leak testing.