Chapter 6 - Functional Checklist
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MNL000300.doc
Revision 1
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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VERSUM MATERIALS, INC. TE11 SOURCE SYSTEM FIELD START‐UP CHECKLIST
page 5 of 9
CALIBRATION
Verify analog scaling (psig) with program documentation
Transducers must be powered up a minimum of 15 minutes. Zero and span should be checked a minimum of 4
times to insure repeatability
Check and record the pressure before and after calibration in psig
Analog #
Label
Left side or single
Right side
(Left/right)
Zero
Zero
Span
Span
Completed
Zero
Zero
Span
Span
Complete
before
after
before
after
before
After
before
after
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
SECTION COMPLETED SIGNATURE
DATE
Notes: