Chapter 8 - Operating Procedures
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MNL000302.doc
Revision 2
01/04/2019
SourceSystemTE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
8
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1.
Confirm with operating personnel that the process gas can be shut off before initiating stop
process gas.
2.
On the Main Menu window, press the "STOP PROCESS GAS" pushbutton
3.
Check and record the following information on the Process Gas Cylinder Change Checklist
(found at the end of Section 8.3.2.5) each time a cylinder is changed.
Pressure readings on:
"PROCESS CYL PRESS" and
"PROCESS DEL PRESS"
Process cylinder weight (if scale is present)
4.
Note the valve color coding key on the graphics:
Color screen
:
Red = valve open (default)
Green = valve closed (default)
Proceed to the troubleshooting section for corrective action if any shutdown or warning conditions
occur. Notify your supervisor immediately or contact your Versum Materials, Inc. representative
for assistance.
5.
On the Main Menu for the side to be purged window, highlight “—START—PRE PURGE”.
6.
Follow prompted manual steps on the screen.
The following valves will sequence on the display during the high pressure purge cycles.
First the tubing between the high pressure valve (V2) and the process cylinder valve
is evacuated.
The high pressure tubing will then be “flush” purged.
The tubing will then be pressurized with purge gas.
This sequence of evacuation and pressurization will be repeated until the configured
number of cycles is completed.