Chapter 7 - System Description
_______________________________________________________________________________________________________________
MNL000301.doc
Revision 2
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
7
-
24
7.9.4 Alarm Conditions And Responses
The following table summarizes the alarms associated with HPLT. Other alarms exist (not listed in the
table) which control the operation of the system.
INPUT
ALARM
RESPONSE
CONDITION
DELAY
SETPOINT (950
psig supply
pressure)
SETPOINT
(220 psig
supply
pressure)
HIGH HP
PURGE PT1
Fault
HI
0
980
233
LOW HP
PURGE PT1
Shutdown
LO
0
900
200
LOW HP
PURGE PT8
Shutdown
LO
0
900
200
HPLT - Alarm Conditions & Responses
7.10 Multiple Process Outlets
Multiple Process Outlets are optional piping configurations available for auto crossover configurations
that can extend the flexibility and application of a single GASGUARD
®
Source System. Each
additional process outlet is furnished with a manual isolation valve and a process line connection with
the option of either a standard bulkhead or a coaxial bulkhead. The VCR connection downstream of
the valve is terminated and capped with a VCR plug at the factory. The additional outlet piping spools
are faced, ready for welding and are shipped loose with the cabinet. Verify all tubing connections with
the flow schematic, or INS drawing (if requested), prior to welding.