Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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3.3
Vent Line
The vent line must be piped directly to an acceptable pollution abatement system designed for the
specific gas being vented. Process gas will be introduced into the vent line during the "Pre-Purge"
purging cycle, when the process gas panel is being purged prior to process gas cylinder removal. At
this time, 50-60 LPM (106-127 CFH) of nitrogen is also being sent into the line through the vacuum
venturi loop. The purging sequences run approximately 30-45 minutes.
Process gas can be introduced to the vent system at
any time in the event of certain multiple component
failures, therefore the vent line and pollution
abatement system should be capable of handling a
full process gas cylinder release in the event of
catastrophic failure.
When multiple gases are to be vented, ensure compatibility before plumbing vents together. Contact
your Versum Materials, Inc. Representative for this information. A nitrogen trickle purge is constantly
bled into the vent line to maintain an inert atmosphere when hazardous gases are being used. For this
reason, a trickle purge valve, V7, is furnished with an orifice. The flow rate of this trickle purge is
approximately 2-5 LPM (4-10 CFH). Figure 3.4 depicts a typical trickle purge assembly.
Figure 3.4:
Typical Trickle Purge Assembly