Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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3.9
Helium Leak Test Port (Optional)
A helium leak test port may be provided on the vent header for connection to a helium mass
spectrometer. A manual valve, MV22, isolates the downstream vent system in order to achieve
vacuums required for in-board leak testing upstream. When leak testing is complete, the VCR port
must be capped and manual valve
MV22 should be
opened and left open during normal operation of the GASGUARD® Source System.
The helium leak test port is for vacuum
service only. Do not connect pressurized
gas to this port.
3.10 Hazardous Gas Leak Detection System
(Customer Requirement)
A gas leak detection system must be installed by the customer for all toxic gases used in the
GASGUARD® cabinet. The detection points must include the interior of the gas cabinet. If a leak is
detected, the system must provide signals that will shutdown the gas cabinet. See specific I/O field
wiring drawings provided in the document envelope.
A hydride leak detection system is highly recommended for Silane and other pyrophoric gases.
Although these gases will normally ignite and burn immediately when they leak to atmosphere, under
certain conditions they can pocket and detonate with devastating force. A hydride monitor can detect
leaking Silane and shutdown the system eliminating or reducing the risk and size of explosion.