Chapter 9 - Troubleshooting
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MNL000303.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
9
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5
9.1.4 Valve Does Not Open
Possible Source of Problem
Test
Solution
Instrument nitrogen supply
not adequate
Check instrument nitrogen
pressure.
Adjust instrument supply
pressure to 85-95 psig (5.9-
6.6 barg).
No signal to solenoid valve
Output circuit fault
Check the solenoid valve for
proper operation.
Check for blown fuse on
output circuit.
Repair, or replace as
necessary.
Replace fuse.
Follow “Troubleshooting Repair, or replace faulty
Digital Inputs” procedure component as
to determine location of fault. Necessary.
9.2
No or Low Purge Gas Pressure
Possible Source of Problem
Test
Solution
Closed purge gas cylinder
valve
Check position of cylinder valve.
Open cylinder valve, pressure
should indicate the current
purge cylinder pressure.
Low purge gas cylinder
pressure
Instrument nitrogen supply not
adequate
Check cylinder pressure.
Check instrument nitrogen
pressure.
Change cylinder following
Cylinder Change Out
Procedures found Chapter 8
Section 3 of this manual.
Adjust instrument supply
Pressure to 85-95 psig (5.9-
6.6 barg).