Chapter 3 - Tubing Connections
_______________________________________________________________________________________________________________
MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
3
-
2
Section 13
Cylinder Cooling (Diborane Mixes)
Section 14
Hazardous Area / Potentially Flammable Atmosphere
Requirements for Racks and Wallmounts
A
ll tubing connections to the GASGUARD® Source System should be designed and installed following the local
piping codes and should comply with the intent of ASME B31.3 "Chemical Plant and Petroleum Refinery
Piping." Tubing must be sized to flow the maximum amount of gas required by the process system. Tubing is
normally constructed of 316L stainless steel. Hastelloy C22 (Nickel‐Chromium‐Molybdenum Alloy) is
sometimes specified by the customer for corrosive gases. Verify the tubing material type on the Specification
Sheet that is supplied with the order.
All tubing connections are made at the top rear of the source system. Connections that terminate with a
VCR fitting are either capped or plugged at the factory and are ready for connection to the facility
piping. Connections that terminate with open tube ends are bagged for shipping purposes. Process and
purge lines are double bagged and taped for shipment. Vent and venturi supply lines are single bagged
and taped. All tube ends have been faced and are ready for welding to facility piping. Welding should
be performed using established high purity welding techniques. Verify all tubing connections with the
flow schematic, or Installation drawing (INS drawing) prior to welding.
Note: When internal terminations are specified, specific inlet/outlets end with VCRs
inside of this enclosure. Field installation is made at this point. Refer to
Specification Sheet or INS drawing to verify if the internal termination option
applies.