Chapter 9 - Troubleshooting
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MNL000303.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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9.6.9 Cylinder Leaking
Probable Cause
Corrective Action
Process cylinder valve not completely
closed.
Close cylinder valve. (Do not
overtorque.) Reinitiate program
sequence. If failed, assume cylinder valve
is leaking and take appropriate emergency
response.
PT2 (Process Delivery Transducer) Alarms
The following are possible process delivery transducer alarms.
9.6.10 Low Vacuum at PT2
Probable Cause
Corrective Action
Vacuum at PT2 is < -10 psig (0.7 barg)
due to Vacuum Venturi supply pressure or
flow requirement is insufficient.
OR
An air operated valve in the PT2 path to
vent is not actuating.
Verify Venturi supply is 70-90 psig (4.8-
6.2 barg) at a deliverable flow rate of 50-
60 slpm (105-127 cfh).
Ensure that 85-95 psig (5.9-6.6 barg) of
pneumatic supply pressure is being
supplied to the controller.
9.6.11 Low Purge Pressure at PT2
Probable Cause
Corrective Action
Purge pressure at PT2 is < 10 psig (0.7
barg) due to low purge delivery pressure.
OR
Process regulator set to deliver less than
10 psig (0.7 barg).
Increase purge delivery to 80-90 psig (5.5-
6.2 barg).
Increase process regulator to deliver more
than 10 psig (0.7 barg).
9.6.12 Low Process Delivery or Very Low Process Delivery
Probable Cause
Corrective Action