Chapter 7 - System Description
_______________________________________________________________________________________________________________
MNL000301.doc
Revision 2
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
7
-
8
The function of each component is described in the table.
V0
Process Cylinder Valve (Customer Supplied)
This valve located on the process cylinder controls process gas flow
from the cylinder to the pigtail. If the valve is pneumatically operated,
it will automatically close on shutdown alarms. Solenoid valve, V8, in
the controller is used to supply the pneumatic cylinder valve (if present).
V2
Automatic Shutoff Valve (On Pigtail)
This pneumatic valve is located on the pigtail, close to the process gas
cylinder. Its primary function is to stop the flow of process gas when a
shutdown alarm occurs or the E-Stop button is pressed.
V2
High-Pressure Process Isolation Valve
This pneumatic vale isolates the pressure regulator and downstream
components from the high pressure process gas.
V3
Low-Pressure Process Isolation Valve
This pneumatic valve isolates the gas cabinet piping from the facility
process piping.
V4
Purge Gas Inlet Valve
This pneumatic valve controls the on/off flow of purge gas to the high
pressure side of the process panel and pigtail.
V4-1
Purge Gas Inlet Double Isolation Valve
This pneumatic valve provides double isolation function for V-4.
V5
High Pressure Vent Valve
This pneumatic valve controls flow from the high pressure side of the
panel to vent/vacuum system.
V6
Low-Pressure Vent Valve
This pneumatic valve controls flow from the low pressure side of the
panel to vent/vacuum system.
V7
Vacuum Venturi Supply Valve