Chapter 9 - Troubleshooting
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MNL000303.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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9.6.5 Low Purge Pressure at PT1
Probable Cause
Corrective Action
Purge pressure at PT1 is less than 70 psig
(4.8 barg) due to low purge delivery
pressure.
Increase purge delivery to 80-90 psig (5.5-
6.2 barg).
9.6.6 High Pressure at Cylinder Connection
(Diss, CGA, Keyed VCR, etc.)
Probable Cause
Corrective Action
Process cylinder valve was accidentally
opened prior to starting the change
cylinder sequence or the post purge
sequence.
Ensure the process cylinder valve is
closed and enter the Manual Mode
(according to the steps in Section 8 of this
manual) and evacuate by opening V7, V5
and V1 until PT1 is less than -5 psig (0.67
barg), reinitiate the sequence.
9.6.7 Standby Leak Detected
Probable Cause
Corrective Action
Used on Auto Crossover Systems Only.
This alarm monitors process gas retention
while a panel is on "Stand-by." Probable
causes are V3, V5 or V6 are leaking
across the seat.
Remove pneumatic line hoses from these
valves and verify absence of pressure. If
pressure is present, this indicates a
solenoid failure. Contact your Versum
Materials, Inc. Technical Representative.
Perform a pre-purge sequence with the
purpose of removing any debris that may
be on the seat of the valves.
9.6.8 Cylinder Connection Leaking
Probable Cause
Corrective Action
Process gas cylinder connection not
properly tightened.
Personal protective equipment (PPE)
MUST be worn when a leak is suspected.
Appropriate PPE is detailed in Chapter 1
Section 9 of this manual. Tighten pigtail
cylinder connection to the value specified in
the CGA Bulletins found in the Appendix. If
leak persists, advise supervisor or contact
Versum Materials, Inc.