Chapter 11 - System Specific Information
___________________________________________________________________________________________________________
____
MNL000305.doc
Revision 3
01/04/2019
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
11
-
5
11.2.2 Source Recommended Mechanical Spare Parts
Process Panel
Process Pigtail
Purge Pigtail
Purge Panel
Purge Purifier (if used)
Process Purifier (if used)
Process Out Spool
Process Crossover Spool (if used)
Purge Crossover Spool
Vacuum Venturi Spool
Contact Versum Materials, Inc. when ordering spare parts. Your equipment commodity code
number will be required when placing your order. The commodity code number can be found on
the enclosure door, cylinder rack frame or cylinder wall mount frame.
Figure 1: Equipment Commodity Code Number on a TE11 Gas Cabinet