Chapter 6 - Functional Checklist
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MNL000300.doc
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09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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VERSUM MATERIALS, INC. TE11 SOURCE SYSTEM FIELD START‐UP CHECKLIST
page 3 of 9
ELECTRICAL
Check off line item when completed
Sign and date when section is completed
Left side or single
Right side
Earth ground installed
120v/220v/24v electrical complete (circle)
Graphics panel condition satisfactory
Elect. sealoffs poured
I/O wired per DWG # EE‐_______
VERSUM MATERIALS, INC. supplied temperature
Verify temperature control power
Verify heat tape power
Jacket temp.______
Jacket temp.______
Set point _____
Set point _____
SECTION COMPLETED
SIGNATURE___________________ DATE ________
Notes: _
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