Chapter 6 - Functional Checklist
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MNL000300.doc
Revision 1
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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6.2 VERSUM MATERIALS, INC. TE11 SOURCE SYSTEM FIELD START‐UP CHECKLIST
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CUSTOMER __________________SYSTEM # _____________ SERIAL #___________
DEVICE DESCRIPTION _____________________________MODEL# _____________
GAS TYPE ___________________START DATE ___________ FINISH DATE ________
TOOL NAME ____________________ TECH REP _________________________________
CUSTOMER SYSTEM LABEL _________________________________________________
VISUAL INSPECTION
PIPING/MECHANICAL
Check off line item when completed
Sign and date when section completed
Left side or single
Right side
Perform visual inspection to verify all mechanical and
electrical connections have been made.
System labeled correctly per Specification Sheet.
System information received: (circle)Specification
Sheet, Flow Schematic,
Customer I/O Drawing,
Inspection and Test sheet (leak test and certification),
Quality Inspection and Test sheet (functional test),
Installation and Operation Manual
All open connections sealed
General appearance satisfactory
Verify leak test from gas bottle to P.O.U. complete
Verify corrosive or toxic scrubber and incinerator
operational and running
Pitot tube installed with correct 90
orientation
Sprinkler line installed (except ClF3)
Tel tails installed
Verify cabinet exhaust is functioning
Panel under pressure 20 psig
25 psig
(1.4 barg
1.7 barg)
Correct process purifier installed per gas service