Chapter 9 - Troubleshooting
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MNL000303.doc
Revision 2
09/16/2016
SourceSystem TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
Page
9
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PT5 (Vent Line Transducer) Alarms
The following are possible vent line transducer alarms.
9.6.17 High Vent Pressure
Probable Cause
Corrective Action
Vent line pressure is above user setpoint
Check pollution abatement equipment for
obstruction.
9.6.18 Low Vacuum Generated PT5
Probable Cause
Corrective Action
Vacuum Venturi supply pressure or flow
requirement is insufficient.
OR
Verify a Venturi supply of 75-95 psig
(5.2-6.6 barg) at 50-60 slpm (106-127 cfh)
is obtainable.
Vent isolation valve, MV22, is closed.
Open manual valve, MV22.
PT8 (Purge Header Transducer) Alarms
The following are possible purge header transducer alarms. This transducer is located downstream of
the purge panel and purge purifier (if installed).
9.6.19
High Purge Delivery PT8 or Very High Purge Delivery PT8
Probable Cause
Corrective Action
V4 (Purge Gas Inlet Valve) and check
valve failure resulting in process gas
entering the common purge header.
Verify alarm was not caused by high
purge gas delivery pressure. If not,
assume V4 is leaking and purge panel,
purge purifier and purge cylinder are
contaminated with process gas. Take
appropriate action. Contact an Versum
Materials, Inc. Representative for
assistance.