Chapter 8 - Operating Procedures
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MNL000302.doc
Revision 2
01/04/2019
SourceSystemTE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
Confidential and Proprietary Data
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Operating in Manual Mode could cause
the following hazards which can result in
PERSONAL INJURY OR DEATH.
Process gas could be forced into the
purge panel and/or purge gas cylinder.
Opening purge panel valves when high
pressure process gas is present.
High
pressure
gas
could be vented.
Opening vent valves when high
pressure process gas is present.
NOTE: Due to the potential hazards listed above, Manual Mode operation
requires a second level security code.
1.
Enter second level (or higher) security code (check with appropriate Air
Products representative for proper password) as follows:
Press TFT touch screen
The LCD screen will prompt: "
PASSWORD" Type in the password.
Press "OK"
If the password is correct, the Main Menu will be displayed. If the password is
incorrect, It will be display a color at “ * “ in Password window.
2. Press "OK"
3. From the Main Menu screen, select source menu for either the left or right
side.
4. From the Mode Menu screen, highlight "
‐‐
MANUAL MODE
‐‐
” by pressing
Manual Mode button (if the button is Grayscale and displays N/A a
shutdown is has occurred that prevents manual operation.)
The MANUAL MODE window will display
5. Operate valves referring to Section 8.5.2 below.
6.
To exit MANUAL MODE, press
NOTE: Pressing
will automatically close any valves which were left open
unless the secure mode feature is used as seen below in section 8.5.2.