Chapter 3 - Tubing Connections
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MNL000297.doc
Revision 2
09/16/2016
Source System TE11
© Versum Materials, Inc. as of the revision and date shown. All rights reserved.
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3.4
Venturi Line
Versum Materials, Inc. strongly recommends separate venturi supply source rather than a
houseline source.
Most process cylinder pressures are significantly higher than houseline operating pressures. In the
event of multiple failures of certain process panel components, there is a remote possibility of back
contamination of the houseline source connected to the vacuum venturi.
Contact your Versum Materials, Inc. representative for design details.
The venturi line requires 75-95 psig (5.2-6.6 barg) of nitrogen to adequately produce the vacuum
needed during purge cycles. The supply is usually taken from a bulk liquid source, but it can also
originate from a cylinder manifold system. The vacuum generator will demand a flow of 50-60 LPM
(106-127 CFH) of nitrogen during purge cycles.
3.5
Purge Line
A purge line may be provided when the nitrogen purge cylinder is not included in the source system.
This purge line must be connected to a designated purge source for the source system. The pressure
required during cylinder purging is typically 80-90 psig (5.5-6.2 barg). If an external purge source is
used, sufficient over pressure protection must be provided. Versum Materials, Inc. recommends a
safety relief valve set at 125 psig (maximum) for the purge supply. Do not exceed the source system
component maximum allowable working pressure (MAWP) in the event of purge source regulator
failure. If an internal purge cylinder is included in the source system the purge line connection does
not apply.
The purge gas source for the GASGUARD®
Source System should be used only to purge
other gas source systems or VMBs handling
the same process gas. It must not be used to
purge systems handling incompatible
process gases. It is recommended that the
purge gas cylinders be placed in an
exhausted enclosure. Purge gas must not be
supplied from a low pressure bulk gas
source.